CPC G01N 21/171 (2013.01) [G01J 3/2823 (2013.01); G01J 3/427 (2013.01); G01J 3/4406 (2013.01); G01J 3/4412 (2013.01); G01N 21/6458 (2013.01); G01N 21/65 (2013.01); G01N 2021/1714 (2013.01)] | 42 Claims |
1. A method for analyzing a sample, the method comprising:
illuminating a region of the sample with a light beam of infrared radiation;
illuminating at least a sub-region of the region of the sample with a probe light beam having a shorter wavelength than the light beam of infrared radiation;
collecting probe light reflected from the sample;
producing a signal indicative of an optical phase shift of the collected probe light; and
obtaining measurements indicative of infrared absorption of the sub-region of the sample based on the signal indicative of the optical phase shift.
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