CPC H03H 9/02228 (2013.01) [H03H 3/04 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01); H03H 2003/0442 (2013.01)] | 22 Claims |
1. An acoustic resonator device comprising:
a substrate;
a piezoelectric plate having front and back surfaces, the back surface attached to the substrate, a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate; and
a conductor pattern at the piezoelectric plate and including an interdigital transducer (IDT) with interleaved fingers at the diaphragm,
wherein a ratio of the mark of the interleaved fingers to the pitch of the interleaved fingers is greater than or equal to 0.2 and less than or equal to 0.3.
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