US 11,881,834 B2
Transversely-excited film bulk acoustic resonator with reduced spurious modes
Soumya Yandrapalli, Lausanne (CH); Viktor Plesski, Gorgier (CH); Julius Koskela, Helsinki (FI); Ventsislav Yantchev, Sofia (BG); and Patrick Turner, San Bruno, CA (US)
Assigned to Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Mar. 12, 2021, as Appl. No. 17/200,703.
Application 17/200,703 is a continuation of application No. 17/030,066, filed on Sep. 23, 2020, granted, now 11,146,232.
Application 17/030,066 is a continuation in part of application No. 16/920,173, filed on Jul. 2, 2020, granted, now 11,139,794.
Application 16/920,173 is a continuation of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/904,386, filed on Sep. 23, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2021/0313951 A1, Oct. 7, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 3/04 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 3/02 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/04 (2013.01); H03H 9/02031 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/023 (2013.01); H03H 2003/0442 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a substrate;
a piezoelectric plate having front and back surfaces, the back surface attached to the substrate, a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate; and
a conductor pattern at the piezoelectric plate and including an interdigital transducer (IDT) with interleaved fingers at the diaphragm,
wherein a ratio of the mark of the interleaved fingers to the pitch of the interleaved fingers is greater than or equal to 0.2 and less than or equal to 0.3.