CPC H01L 21/02568 (2013.01) [H01L 21/0262 (2013.01); H01L 21/02491 (2013.01); H01L 21/02658 (2013.01)] | 19 Claims |
1. A method of forming a transition metal dichalcogenide thin film on a substrate, the method comprising:
treating the substrate with a metal organic material, the metal organic material including a metal; and
providing a transition metal precursor and a chalcogen precursor around the substrate to synthesize a transition metal dichalcogenide on the substrate, the transition metal precursor including a transition metal element and the chalcogen precursor including a chalcogen element, wherein
the treating the substrate provides the metal on a surface of the substrate,
the treating the substrate is performed without using H2S and includes heat-treating a vicinity of the substrate at a process temperature of 300° C. to 500° C. to decompose the metal organic material.
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