CPC H01J 37/20 (2013.01) [H01L 21/6838 (2013.01); H01J 2237/184 (2013.01); H01J 2237/204 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/2602 (2013.01)] | 20 Claims |
1. A specimen holder apparatus for an imaging system, the specimen holder apparatus comprising:
an end effector with an alignment feature for releasably receiving a grid carrier with a specimen thereon;
at least one flexure that is connectable to the end effector for fixing the grid carrier in the alignment feature of the end effector, wherein the flexure is movably connected to the end effector, wherein the flexure is movable between a clamped and an unclamped position, wherein in the unclamped position the grid carrier can be placed adjacent to the alignment feature of the end effector, and wherein in the clamped position the grid carrier can be secured in the alignment feature of the end effector.
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