US 11,881,377 B2
Automated multi-grid handling apparatus
Richard Joseph Pickreign, Harvard, MA (US)
Assigned to Richard J. Pickreign, Harvard, MA (US)
Filed by Richard Joseph Pickreign, Harvard, MA (US)
Filed on Sep. 7, 2022, as Appl. No. 17/939,530.
Application 17/939,530 is a continuation of application No. 17/374,008, filed on Jul. 13, 2021, granted, now 11,450,507.
Application 17/374,008 is a continuation of application No. 16/611,935, granted, now 11,075,055, issued on Jul. 27, 2021, previously published as PCT/US2018/032287, filed on May 11, 2018.
Claims priority of provisional application 62/504,835, filed on May 11, 2017.
Prior Publication US 2022/0415607 A1, Dec. 29, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/20 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/20 (2013.01) [H01L 21/6838 (2013.01); H01J 2237/184 (2013.01); H01J 2237/204 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/2602 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A specimen holder apparatus for an imaging system, the specimen holder apparatus comprising:
an end effector with an alignment feature for releasably receiving a grid carrier with a specimen thereon;
at least one flexure that is connectable to the end effector for fixing the grid carrier in the alignment feature of the end effector, wherein the flexure is movably connected to the end effector, wherein the flexure is movable between a clamped and an unclamped position, wherein in the unclamped position the grid carrier can be placed adjacent to the alignment feature of the end effector, and wherein in the clamped position the grid carrier can be secured in the alignment feature of the end effector.