US 11,879,906 B2
Inertial sensor sensing of vibration frequency
Aurelio Pellegrini, Sestola (IT)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Nov. 18, 2021, as Appl. No. 17/530,125.
Prior Publication US 2023/0152345 A1, May 18, 2023
Int. Cl. G01P 15/125 (2006.01); G01C 19/5712 (2012.01); G01P 1/00 (2006.01); G01D 1/08 (2006.01); G01H 1/14 (2006.01); G01D 1/02 (2006.01); G01D 1/16 (2006.01)
CPC G01P 15/125 (2013.01) [G01C 19/5712 (2013.01); G01P 1/00 (2013.01); G01D 1/02 (2013.01); G01D 1/08 (2013.01); G01D 1/16 (2013.01); G01H 1/14 (2013.01)] 21 Claims
OG exemplary drawing
1. A method for identifying a frequency of an external vibration by a microelectromechanical system (MEMS) inertial sensor, comprising:
generating, by processing circuitry of the MEMS inertial sensor, a frequency scan signal pattern comprising a plurality of periodic signal portions each having a test frequency;
sensing, by one or more sense electrodes of the inertial sensor, a movement of a proof mass of the inertial sensor over a period of time;
generating, by the processing circuitry of the inertial sensor, a sense signal based on the sensed movement of the proof mass over the period of time;
correlating, by the processing circuitry, the sense signal with the frequency scan signal pattern;
generating, by the processing circuitry, a plurality of correlation values based on the correlating, wherein each of the plurality of correlation values is based on a correlation of the sense signal with one of the plurality of periodic signal portions; and
identifying, by the processing circuitry, a frequency associated with the sense signal based on one or more of the generated plurality of correlation values.