CPC G01N 1/2211 (2013.01) [B01L 3/502761 (2013.01); F04B 39/0027 (2013.01); F04B 43/043 (2013.01); F04B 45/043 (2013.01); F04B 45/047 (2013.01); G01N 1/2205 (2013.01); G01N 1/2273 (2013.01); G01N 1/24 (2013.01); G01N 15/0255 (2013.01); G01N 15/0606 (2013.01); G01N 15/0637 (2013.01); B01L 2200/0652 (2013.01); B01L 2300/0864 (2013.01); G01N 2001/2223 (2013.01); G01N 2015/0046 (2013.01)] | 29 Claims |
1. A fractionator for a particulate matter (PM) monitor, comprising:
a body defining a vertical air inlet to receive a stream of air from outside the body, the stream of air comprising particles of varying sizes;
a plurality of microfluidic channels within the body, wherein inertial forces within the microfluidic channels are configured to separate the particles by size;
a horizontal air outlet in fluid communication with at least one of the plurality of microfluidic channels for particles having a size below a threshold size; and
a vertical air outlet in fluid communication with at least one of the plurality of microfluidic channels for particles having a size above a threshold size;
wherein the fractionator comprises a first wafer and a second wafer bonded together, wherein each wafer comprises a device layer, a buried oxide (BOX) layer, and a handle layer.
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