CPC H03F 3/245 (2013.01) [H01J 37/32165 (2013.01); H01J 37/32174 (2013.01); H01J 37/32944 (2013.01); H01J 37/3299 (2013.01); H03F 1/0211 (2013.01); H03F 3/195 (2013.01); H03F 2200/451 (2013.01)] | 25 Claims |
1. A radio-frequency generator, comprising:
a power amplifier module comprising at least one power amplifier;
at least one pickup module connected to an output of the at least one power amplifier to generate at least one pickup signal;
at least one output configured to be connected to the respective output of the at least one amplifier and configured to output at least one radio-frequency output signal; and
a controller comprising:
a measurement module configured to receive the at least one pickup signal and to generate at least one measurement signal based on the at least one pickup signal; and
a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide at least one drive signal as input to the power amplifier module;
a regulation module configured to receive the at least one measurement signal, and to regulate the power of the at least one radio-frequency output signal based on the at least one measurement signal, wherein the controller is configured to regulate the power of the at least one radio-frequency output signal by adjusting the amplitude and/or phase of at least one of the two or more carrier signals based on the measurement signal.
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