US 12,206,372 B2
Radio frequency generator
Daniel Gruner, Müllheim (DE); André Grede, Bern (CH); Nikolai Schwerg, Bern (CH); Anton Labanc, Ehrenkirchen (DE); Manuel vor dem Brocke, Bramsche (DE); and Roland Schlierf, Frechen (DE)
Assigned to COMET AG, Flamatt (CH)
Appl. No. 17/611,224
Filed by COMET AG, Flamatt (CH)
PCT Filed May 22, 2020, PCT No. PCT/EP2020/064279
§ 371(c)(1), (2) Date Nov. 15, 2021,
PCT Pub. No. WO2020/234453, PCT Pub. Date Nov. 26, 2020.
Claims priority of application No. 1907306 (GB), filed on May 23, 2019.
Prior Publication US 2022/0216838 A1, Jul. 7, 2022
Int. Cl. H03F 3/24 (2006.01); H01J 37/32 (2006.01); H03F 1/02 (2006.01); H03F 3/195 (2006.01)
CPC H03F 3/245 (2013.01) [H01J 37/32165 (2013.01); H01J 37/32174 (2013.01); H01J 37/32944 (2013.01); H01J 37/3299 (2013.01); H03F 1/0211 (2013.01); H03F 3/195 (2013.01); H03F 2200/451 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A radio-frequency generator, comprising:
a power amplifier module comprising at least one power amplifier;
at least one pickup module connected to an output of the at least one power amplifier to generate at least one pickup signal;
at least one output configured to be connected to the respective output of the at least one amplifier and configured to output at least one radio-frequency output signal; and
a controller comprising:
a measurement module configured to receive the at least one pickup signal and to generate at least one measurement signal based on the at least one pickup signal; and
a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide at least one drive signal as input to the power amplifier module;
a regulation module configured to receive the at least one measurement signal, and to regulate the power of the at least one radio-frequency output signal based on the at least one measurement signal, wherein the controller is configured to regulate the power of the at least one radio-frequency output signal by adjusting the amplitude and/or phase of at least one of the two or more carrier signals based on the measurement signal.