US 12,206,342 B2
Substrate processing apparatus
Jairo T. Moura, Marlborough, MA (US); Vincent Tsang, Lincoln, MA (US); Karanjit Saini, Chelmsford, MA (US); Robert T. Caveney, Windham, NH (US); Robert C. May, Austin, TX (US); and Daniel Babbs, Austin, TX (US)
Assigned to Brooks Automation US, LLC, Chelmsford, MA (US)
Filed by Brooks Automation US, LLC., Chelmsford, MA (US)
Filed on Oct. 27, 2022, as Appl. No. 18/050,300.
Claims priority of provisional application 63/273,579, filed on Oct. 29, 2021.
Prior Publication US 2023/0143307 A1, May 11, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01H 47/00 (2006.01); H01F 7/10 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H02N 15/00 (2006.01)
CPC H02N 15/00 (2013.01) [H01F 7/10 (2013.01); H01L 21/67265 (2013.01); H01L 21/67748 (2013.01)] 37 Claims
OG exemplary drawing
 
1. A linear electrical machine comprising:
a frame with a level reference plane;
an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the level reference plane, the array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to a multiphase alternating current power source energizing each electromagnet;
at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with multiphase alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along the at least one drive line, in a controlled attitude relative to the drive plane; and
a controller operably coupled to the array of electromagnets and the multiphase alternating current power source and configured so as to sequentially excite the electromagnets with the multiphase alternating current with a predetermined excitation characteristic so that each reaction platen has six degrees of freedom reaction platen control and is levitated and propelled with at least four degrees of freedom from the six degrees of freedom reaction platen control, wherein the controller is configured so as to determine reaction platen position feedback, in at least one degree of freedom from the six degrees of freedom reaction platen control, from variance in the predetermined excitation characteristic of the alternating current of at least one electromagnet effecting levitation or propulsion of the reaction platen, wherein the variance in the predetermined excitation characteristic defines self-deterministic reaction platen position feedback of each of the at least one electromagnet, of the array of electromagnets, effecting levitation or propulsion of the reaction platen.