CPC H01L 24/32 (2013.01) [H01L 23/13 (2013.01); H01L 24/83 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/83855 (2013.01)] | 13 Claims |
1. An apparatus, comprising:
a first chip comprising a cavity located between lateral walls of the first chip; and
a carrier mechanically anchored with the first chip at a top portion of the lateral walls, the carrier comprising a second chip configured to optically align with the first chip at a side portion of one of the lateral walls,
wherein the first and second chips are free of contact at a bottom surface of the second chip and a bottom surface of the cavity.
|