CPC H01J 37/04 (2013.01) [G01N 23/04 (2013.01); G01N 2223/612 (2013.01); H01J 2237/0451 (2013.01)] | 13 Claims |
1. A method of illuminating a sample in a Transmission Electron Microscope (TEM), the TEM having an illumination system comprising a set of optical lenses arranged in a column, and a camera, comprising:
configuring the illumination system with a non-circular beam shaping aperture;
during an illumination mode, illuminating a specimen using a non-circular shaped beam formed by the non-circular beam shaping aperture; and
tiling the non-circular shaped beam to maximize an area of the specimen imaged by the TEM;
wherein the non-circular beam is rotated with respect to an orientation of the camera.
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