CPC G02B 21/008 (2013.01) [G01J 1/44 (2013.01); G01N 21/6458 (2013.01); G02B 21/0032 (2013.01); G02B 21/0036 (2013.01); G02B 21/0076 (2013.01); G02B 21/02 (2013.01); G02B 21/082 (2013.01); G01J 2001/442 (2013.01)] | 20 Claims |
1. A light microscope comprising:
a light source for illuminating a specimen;
a sensor array including photon-counting detector elements for measuring detection light coming from the specimen; and
a control device for controlling the sensor array, wherein the control device or parts of the control device and the sensor array are built in the same integrated circuit, with multi-bit counters formed as on-chip multi-bit counters;
wherein
the control device is configured for flexibly binning the photon-counting detector elements into one or more super-pixels, wherein outputs of all photon-counting detector elements binned into the same super-pixel are combined into a common output line:
the control device is configured to assign a respective one of the multi-bit counters to each super-pixel, wherein each of the multi-bit counters outputs a cumulative number indicative of counted photons by all photon-counting detector elements binned into the respective super-pixel.
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