| CPC G01R 1/07342 (2013.01) | 8 Claims |
|
1. A vertical probe card device, comprising:
a first guiding board unit and a second guiding board unit that is spaced apart from the first guiding board unit; and
a plurality of fence-like probes passing through the first guiding board unit and the second guiding board unit, wherein each of the fence-like probes has a probe length within a range from 6 mm to 8 mm, and each of the fence-like probes includes:
a fence-like segment having an elongated shape defining a longitudinal direction, wherein the fence-like segment includes:
a penetrating slot formed along the longitudinal direction and having a length greater than 65% of the probe length; and
a first protrusion extending from one of two long walls of the penetrating slot by a first predetermined width and spaced apart from another one of the two long walls of the penetrating slot by a first gap; and
a connection segment and a testing segment that are respectively connected to two end portions of the fence-like segment and that respectively pass through the first guiding board unit and the second guiding board unit;
wherein, when the first guiding board unit and the second guiding board unit are staggered with each other, the fence-like segments of the fence-like probes elastically bend in a same direction;
wherein, in each of the fence-like probes, the fence-like segment includes a second protrusion that extends from one of the two long walls of the penetrating slot by a second predetermined width and that is spaced apart from another one of the two long walls of the penetrating slot by a second gap;
wherein, each of the fence-like probes includes a ceramic layer that is directly formed on an outer surface of the fence-like segment and that is not arranged in the first guiding board unit and the second guiding board unit, and wherein a cross-cut test result of the ceramic layer of each of the fence-like probes is at least class 3B under the ASTM standard.
|