| CPC G01N 21/9501 (2013.01) | 18 Claims |
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1. A measurement system, comprising:
a light source configured to produce an original beam, wherein a return beam is formed by the original beam returning from a measured area of a measured object;
an optical assembly configured to produce a pending beam based on the return beam, wherein at least part of the pending beam acts as a first beam;
a first detection device configured to obtain first detection information based on the first beam;
a mobile device configured to move the optical assembly and the measured object with respect to each other in a direction of an optical axis of the optical assembly; and
a processing system configured to determine, using the first detection information obtained by the first detection device for a first moment, an actual distance between the optical assembly and a fixed plane of the measured object at the first moment,
wherein the processing system configured to determine an actual distance between the optical assembly and a fixed plane of the measured object at each first moment includes:
controlling the mobile device such that the optical assembly and the measured object are moved with respect to each other in the direction of the optical axis, so that there are a desired plurality of predetermined distances between the optical assembly and the fixed plane at a plurality of second moments;
obtaining the first detection information at each second moment of the plurality of second moments; and
determining the actual distance between the optical assembly and the fixed plane at first moment based on the plurality of predetermined distances and the plurality of first detection information at each second moment.
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