| CPC G01N 21/6456 (2013.01) [G01N 21/6428 (2013.01); G01N 21/88 (2013.01); G01N 2021/6439 (2013.01); G01N 2201/0634 (2013.01); G01N 2201/0636 (2013.01)] | 21 Claims |
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1. A multi-element super resolution inspection system comprising:
an array of inspection sub-systems, each inspection sub-system comprising:
one or more illumination sources configured to illuminate a sample positioned on a stage with one or more illumination beams, the sample including at least a first material and at least a second material, wherein the first material is different from the second material, the sample including a plurality of photoluminescent markers configured to selectively bind to one of the first material or the second material to enhance a feature of interest on the sample;
a set of optical elements, at least one optical element of the set of optical elements configured to independently and selectively direct the one or more illumination beams from the one or more illumination sources to the plurality photoluminescent markers of the sample to cause at least one photoluminescent marker of the plurality of photoluminescent markers to emit photoluminescent illumination; and
one or more detectors configured to detect the photoluminescent illumination emitted by the at least one photoluminescent marker of the plurality of photoluminescent markers selectively bound to one of the first material or the second material of the sample, the set of optical elements configured to selectively direct the photoluminescent illumination from the at least one photoluminescent marker of the plurality of photoluminescent markers of one of the first material or the second material of the sample to the one or more detectors,
wherein a first inspection sub-system of the array of inspection sub-systems is configured to generate a first illumination beam at a first time interval and direct the first illumination beam to a first portion of the sample including a first set of photoluminescent markers to cause the first set of photoluminescent markers to emit photoluminescent illumination at the first time interval, the first inspection sub-system of the array of inspection sub-systems configured to image the first portion of the sample at the first time interval when the first set of photoluminescent markers are emitting photoluminescent illumination to generate a first optical image,
wherein one or more additional inspection sub-systems of the array of inspection sub-systems are configured to generate an additional set of illumination beams at one or more additional time intervals and direct the additional sets of illumination beams to one or more additional portions of the sample including one or more additional sets of photoluminescent markers to cause the one or more additional sets of photoluminescent markers to emit photoluminescent illumination at the one or more additional time intervals, the one or more additional inspection sub-systems of the array of inspection sub-systems configured to image the one or more additional portions of the sample at the one or more additional time intervals when the one or more additional sets of photoluminescent markers are emitting photoluminescent illumination to generate one or more additional optical images; and
a controller communicatively coupled to the array of inspection sub-systems, wherein the controller includes one or more processors configured to execute program instructions:
receive the first optical image from the first inspection sub-system;
receive the one or more additional optical images from the one or more additional inspection sub-systems;
generate an accumulated optical image based on the received first optical image and the one or more additional received optical images;
determine a location of the plurality of photoluminescent markers based on the accumulated optical image; and
determine a pattern of the sample based on the determined location of the plurality of photoluminescent markers.
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