| CPC G01M 99/008 (2013.01) | 14 Claims |
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1. A system comprising:
a semiconductor processing system comprising a substrate processing chamber, a first communication channel, a pump comprising an intrinsic sensor and an external sensor, the pump being external from the substrate processing chamber;
a memory comprising computer-readable instructions; and
a processor coupled to the memory, the processor configured by the computer-readable instructions to cause the processor to execute a method for detecting anomalies in the semiconductor processing system, the method comprising:
receiving a processing chamber attribute of the substrate processing chamber;
receiving sub-fab sensor data from the pump, wherein receiving the sub-fab sensor data comprises receiving intrinsic sensor data from the intrinsic sensor via the first communication channel and receiving external sensor data from the external sensor via a second communication channel being different from the first communication channel;
generating virtual sensor data based on the processing chamber attribute and the sub-fab sensor data, the virtual sensor data correlating the intrinsic sensor data, the external sensor data, the processing chamber attribute, and a plurality of thresholds along a same time axis, the plurality of thresholds comprising a first threshold that causes generating a warning signal for an intervention action of the pump and a second threshold indicating a failure of the pump; and
performing, based on the virtual sensor data, a maintenance operation of the semiconductor processing system, the maintenance operation comprising decommissioning the pump, altering an operation of the pump, changing a processing recipe for a tool coupled to the pump, closing down the tool, or rerouting a substrate to another semiconductor processing system.
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