US 12,203,745 B2
Metrology for additive manufacturing
Eric Peter Goodwin, Oro Valley, AZ (US); Heather Lynn Durko, Tucson, AZ (US); Daniel Gene Smith, Tucson, AZ (US); Johnathan Agustin Marquez, San Francisco, CA (US); Michael Birk Binnard, Belmont, CA (US); Patrick Shih Chang, San Francisco, CA (US); Matthew Parker-McCormick Bjork, Oakland, CA (US); Paul Derek Coon, Redwood City, CA (US); Brett William Herr, Menlo Park, CA (US); and Motofusa Ishikawa, Ageo (JP)
Assigned to Nikon Corporation, Tokyo (JP)
Appl. No. 17/623,570
Filed by Nikon Corporation, Tokyo (JP)
PCT Filed Jul. 2, 2020, PCT No. PCT/US2020/040772
§ 371(c)(1), (2) Date Dec. 28, 2021,
PCT Pub. No. WO2021/003444, PCT Pub. Date Jan. 7, 2021.
Claims priority of provisional application 62/869,856, filed on Jul. 2, 2019.
Prior Publication US 2022/0252392 A1, Aug. 11, 2022
Int. Cl. G01B 11/25 (2006.01); B22F 10/80 (2021.01); B22F 12/90 (2021.01); B33Y 30/00 (2015.01); B33Y 50/00 (2015.01)
CPC G01B 11/2527 (2013.01) [B22F 10/80 (2021.01); B22F 12/90 (2021.01); B33Y 30/00 (2014.12); B33Y 50/00 (2014.12); G01B 11/2536 (2013.01)] 39 Claims
OG exemplary drawing
 
1. A 3D metrology system for determining a topography of a surface of a powder bed of a powder bed fusion type 3D printer, the system comprising:
a fringe projection system that projects a set of spatially overlapping fringe patterns on a surface of a powder bed simultaneously, each one of the fringe patterns in the set of spatially overlapping fringe patterns being generated by a different wavelength than each of the other fringe patterns in the set to provide a composite multi-fringe projection projected on the surface;
an imaging system that collects at least one of reflected and scattered light from the composite multi-fringe projection projected on the surface to provide imaging data; and
a processing system configured to:
determine a phase map of the surface from the imaging data; and
determine a topography of the surface based on the phase map.