US 12,203,312 B2
System, method, and device for monitoring closed state of cover of exposure machine, medium, and equipment
Xueyu Liang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jan. 21, 2022, as Appl. No. 17/580,754.
Application 17/580,754 is a continuation of application No. PCT/CN2021/105800, filed on Jul. 12, 2021.
Claims priority of application No. 202010956265.4 (CN), filed on Sep. 11, 2020.
Prior Publication US 2022/0136304 A1, May 5, 2022
Int. Cl. G01D 5/20 (2006.01); E05F 15/611 (2015.01); G01D 5/347 (2006.01); G08B 21/18 (2006.01)
CPC E05F 15/611 (2015.01) [G01D 5/20 (2013.01); G01D 5/3473 (2013.01); G08B 21/182 (2013.01); E05Y 2201/434 (2013.01); E05Y 2400/354 (2013.01); E05Y 2400/44 (2013.01); E05Y 2400/814 (2013.01); E05Y 2400/822 (2013.01); E05Y 2999/00 (2024.05)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a servo motor, wherein a shaft of the servo motor is coaxially fixedly connected to a shaft of a cover of an exposure machine;
a photoelectric encoder, wherein the photoelectric encoder is provided on the servo motor, and is configured to detect an angle of rotation of the shaft of the servo motor;
a controller, wherein the controller is connected to the servo motor and the photoelectric encoder, and is configured to control rotation of the shaft of the servo motor and determine whether the cover is in a closed state according to the angle;
a sensing plate of a proximity switch, wherein the sensing plate of the proximity switch is provided atop a side of the cover away from the shaft of the cover; and
a sensor of the proximity switch, wherein the sensor of the proximity switch is in signal connection with the controller, is provided atop a side of a cover frame of the exposure machine away from the shaft of the cover corresponding to the sensing plate of the proximity switch, and is configured to, in response to the cover being closed and the sensing plate of the proximity switch approaching the sensor of the proximity switch, generate a proximity signal and send the proximity signal to the controller.