US 12,203,168 B2
Metal deposition
Ravi Vellanki, San Jose, CA (US); Eric H. Lenz, Livermore, CA (US); Vinayakaraddy Gulabal, Yadgir (IN); Sanjay Gopinath, Fremont, CA (US); Michal Danek, Cupertino, CA (US); Prodyut Majumder, Milpitas, CA (US); Novy Tjokro, Union City, CA (US); Yen-Chang Chen, Taipei (TW); Shruti Vivek Thombare, Sunnyvale, CA (US); Gorun Butail, Fremont, CA (US); and Patrick A. van Cleemput, Duvall, WA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/638,599
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Aug. 19, 2020, PCT No. PCT/US2020/070434
§ 371(c)(1), (2) Date Feb. 25, 2022,
PCT Pub. No. WO2021/042114, PCT Pub. Date Mar. 4, 2021.
Claims priority of provisional application 62/892,935, filed on Aug. 28, 2019.
Prior Publication US 2022/0290300 A1, Sep. 15, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/45565 (2013.01) [C23C 16/45544 (2013.01); C23C 16/45591 (2013.01); C23C 16/52 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A showerhead comprising:
a faceplate partially defined by a front surface and a back surface, and having a plurality of faceplate through-holes extending through the faceplate from the front surface to the back surface;
a back plate having a gas inlet, a first conical frustum surface, and a second conical frustum surface;
a plenum volume fluidically connected to the gas inlet and at least partially defined by the gas inlet, the back surface of the faceplate, the first conical frustum surface, and the second conical frustum surface; and
a baffle plate positioned within the plenum volume, partially defined by a top surface and a bottom surface, and having a plurality of baffle plate through-holes extending through the baffle plate from the top surface to the bottom surface, wherein:
the second conical frustum surface is positioned radially outwards from the first conical frustum surface with respect to a center axis of the showerhead,
the second conical frustum surface is positioned along the center axis farther from the gas inlet than the first conical frustum surface,
the first conical frustum surface is at a first angle with respect to the center axis,
the second conical frustum surface is at a second angle with respect to the center axis.