US 12,202,696 B2
Apparatus of supporting debonding and method for debonding using the same
Bokyung Kong, Hwaseong-si (KR); and Kyungwook Park, Seoul (KR)
Assigned to CORNING INCORPORATED, Corning, NY (US)
Appl. No. 16/981,869
Filed by CORNING INCORPORATED, Corning, NY (US)
PCT Filed Mar. 20, 2019, PCT No. PCT/KR2019/003213
§ 371(c)(1), (2) Date Apr. 27, 2021,
PCT Pub. No. WO2019/182338, PCT Pub. Date Sep. 26, 2019.
Claims priority of application No. 10-2018-0032006 (KR), filed on Mar. 20, 2018.
Prior Publication US 2021/0238002 A1, Aug. 5, 2021
Int. Cl. B65H 41/00 (2006.01); B29C 63/00 (2006.01)
CPC B65H 41/00 (2013.01) [B29C 63/0013 (2013.01); B65H 2301/51122 (2013.01); B65H 2406/351 (2013.01); B65H 2406/3622 (2013.01); B65H 2406/3663 (2013.01); B65H 2801/61 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A debonding method comprising:
aligning a glass assembly, which comprises a sheet of ultrathin glass and a sheet of carrier glass bonded to each other, on a support region of a suction plate of a debonding support device such that the sheet of ultrathin glass faces and is in direct contact with the support region;
wherein the debonding support device comprises:
the suction plate comprising the support region for supporting the glass assembly, the support region comprising at least two suction regions applying different suction forces per unit area, the at least two suction regions comprising a debonding initiation portion suction region for sucking a debonding initiation portion of the glass assembly at which debonding of the glass assembly is configured to be initiated, the debonding initiation portion suction region applying the strongest of the different suction forces per unit area;
a vacuum pump connected to the suction plate to provide a vacuum pressure for the suction plate, and
a controller configured to control the vacuum pump to adjust the vacuum pressure;
providing the vacuum pressure to the suction plate to support and suck the glass assembly;
initiating debonding by advancing a debonding starter into a space between the suction plate and the sheet of carrier glass; and
debonding the sheet of carrier glass from the sheet of ultrathin glass over the entire support region.