US 12,202,073 B2
Method for manufacturing large-area volume grating via plasma grating direct writing
Heping Zeng, Chongqing (CN); Junyi Nan, Chongqing (CN); and Mengyun Hu, Chongqing (CN)
Assigned to CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY, Chongqing (CN); ROI OPTOELECTRONICS TECHNOLOGY CO, LTD., Shanghai (CN); and EAST CHINA NORMAL UNIVERSITY, Shanghai (CN)
Filed by Chongqing Institute of East China Normal University, Chongqing (CN); ROI Optoelectronics Technology CO, LTD., Shanghai (CN); and East China Normal University, Shanghai (CN)
Filed on Nov. 17, 2021, as Appl. No. 17/528,468.
Claims priority of application No. 202011283167.5 (CN), filed on Nov. 17, 2020.
Prior Publication US 2022/0152740 A1, May 19, 2022
Int. Cl. C03C 23/00 (2006.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/067 (2006.01); B23K 26/08 (2014.01); B23K 26/14 (2014.01); B23K 26/362 (2014.01); G02B 5/18 (2006.01); B23K 103/00 (2006.01)
CPC B23K 26/362 (2013.01) [B23K 26/0608 (2013.01); B23K 26/0624 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/0673 (2013.01); B23K 26/0861 (2013.01); B23K 26/14 (2013.01); G02B 5/1857 (2013.01); B23K 2103/54 (2018.08)] 20 Claims
OG exemplary drawing
 
1. A method for manufacturing a large-area volume grating via plasma grating direct writing, comprising:
(1) splitting a laser beam output by an ultrafast pulse laser into two or more laser beams with equal power proportion via a splitting module, converging the two or more laser beams into a sample at an included angle θ less than 60° via a spatio-temporal synchronization module and a converging module, such that a first plasma grating is formed in the sample by interference of the two or more laser beams, the sample being fixed on an electronically controlled three-dimensional mobile platform;
(2) moving the sample in a longitudinal direction of a plane vertical to the first plasma grating to etch out a first prefabricated volume grating with an equivalent cross section to that of the first plasma grating;
(3) moving the sample laterally and keeping a distance from a focal point of the two or more laser beams to a front surface of the sample unchanged to form a second plasma grating at another position of the sample, an effective cross section of the first prefabricated volume grating partially overlapping with a cross section of the second plasma grating, then moving the sample in a longitudinal direction of a plane vertical to the second plasma grating to etch out a second prefabricated volume grating with an equivalent cross section to that of the second plasma grating; and
(4) repeating steps (2) and (3) n times to obtain a volume grating having a width W=n·w0, a length equal to a length L etched by each plasma grating in a cross section of the sample perpendicular to a propagation direction of the laser, and a depth equal to a length D of optical filaments of each plasma grating formed in the sample, wherein n represents a positive integer greater than 0, w0 represents an effective width of each plasma grating.