US 12,202,015 B2
Airborne contaminant management method and system
Chih-Ming Tsao, Hsinchu (TW); Tzu-Sou Chuang, Hsinchu (TW); and Chwen Yu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Sep. 16, 2021, as Appl. No. 17/477,453.
Claims priority of provisional application 63/163,271, filed on Mar. 19, 2021.
Prior Publication US 2022/0297170 A1, Sep. 22, 2022
Int. Cl. B08B 15/00 (2006.01); B01D 46/44 (2006.01); G05B 15/02 (2006.01); G06V 10/75 (2022.01); G06V 20/00 (2022.01); H01J 49/00 (2006.01); H01J 49/40 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC B08B 15/00 (2013.01) [B01D 46/442 (2013.01); G05B 15/02 (2013.01); H01J 49/0036 (2013.01); H01J 49/40 (2013.01); H01L 21/67017 (2013.01); B01D 2279/35 (2013.01); G06V 10/751 (2022.01); G06V 20/00 (2022.01); H01L 21/67703 (2013.01); H01L 21/67739 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
generating a contaminant distribution map by sampling an environment of a cleanroom;
selecting a first fabrication tool of the cleanroom by comparing the contaminant distribution map with at least one diffusion image in a first database;
comparing parameters of the first fabrication tool against process utility information in a second database; and
when the parameters are consistent with the process utility information, taking at least one action of:
moving a cleaning tool to a location associated with a contaminant concentration of the contaminant distribution map;
turning on a fan of the cleaning tool;
stopping pod transit to the first fabrication tool; or
halting production by the first fabrication tool.