US 11,877,500 B2
Mask assembly
Sanghoon Kim, Hwaseong-si (KR); Jongbum Kim, Yongin-si (KR); Yeonju Kang, Hwaseong-si (KR); Jongsung Park, Hwaseong-si (KR); Sangshin Lee, Yongin-si (KR); Seungjin Lee, Suwon-si (KR); and Eunjoung Jung, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Mar. 19, 2021, as Appl. No. 17/206,757.
Claims priority of application No. 10-2020-0072462 (KR), filed on Jun. 15, 2020.
Prior Publication US 2021/0391541 A1, Dec. 16, 2021
Int. Cl. H01L 51/56 (2006.01); H10K 71/16 (2023.01); C23C 14/04 (2006.01); H10K 71/00 (2023.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); H10K 71/00 (2023.02); H10K 71/164 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A mask assembly comprising:
a mask including a pattern region where openings are formed, the mask extending in a first direction; and
a blocking stick disposed under the mask, overlapping a first side portion of the mask, and extending in the first direction,
wherein the mask further includes:
dummy opening regions disposed in the pattern region and arranged in the first direction in the first side portion of the mask, the dummy opening regions where openings are formed; and
opening regions disposed in the pattern region and arranged in the first direction in a second side portion that is opposite to the first side portion of the mask, the opening regions corresponding to the dummy opening regions, respectively, the opening regions where openings are formed, and
a number of the openings per a unit area in each of the dummy opening region and the opening region is smaller than a number of the openings per a unit area in the pattern region.