US 11,877,499 B2
Vapor deposition mask, manufacturing method for vapor deposition mask, and manufacturing method for display device
Takehiro Nishi, Tokyo (JP)
Assigned to TOPPAN PRINTING CO., LTD., Tokyo (JP)
Filed by TOPPAN PRINTING CO., LTD., Tokyo (JP)
Filed on Apr. 3, 2020, as Appl. No. 16/840,260.
Application 16/840,260 is a continuation of application No. PCT/JP2018/038126, filed on Oct. 12, 2018.
Claims priority of application No. 2017-199919 (JP), filed on Oct. 13, 2017.
Prior Publication US 2020/0235298 A1, Jul. 23, 2020
Int. Cl. C23C 14/04 (2006.01); C23C 14/24 (2006.01); B05C 21/00 (2006.01); H10K 71/16 (2023.01); H05B 33/10 (2006.01); H10K 71/00 (2023.01)
CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); C23C 14/24 (2013.01); H05B 33/10 (2013.01); H10K 71/00 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A vapor deposition mask including a metal plate and a plurality of mask holes in the metal plate, the vapor deposition mask comprising:
a front surface;
a back surface opposite to the front surface; and
inner surfaces defining respective ones of the plurality of mask holes, wherein
each of the plurality of mask holes extends between the front surface and the back surface,
in a plan view of the front surface, each of the plurality of mask holes includes a first opening, which is located at the front surface, and a second, smaller opening, which is located inside the first opening,
at least a section of each of the plurality of mask holes has a shape of an inverted frustum extending between the first opening and the second, smaller opening, and
each of the inner surfaces includes an arcuate stepped surface comprising a plurality of steps spreading from the second, smaller opening toward the first opening as viewed in a cross-section orthogonal to the front surface,
the arcuate stepped surface has two steps,
as viewed in a cross-section orthogonal to the front surface, the arcuate stepped surface has an arcuate section having two arcuate steps,
the arcuate section includes a first arc and a second arc that is located closer to the mask back surface than the first arc,
the first arc has a first curvature radius and the second arc has a second, larger curvature radius,
as viewed in the cross-section the second arc has a center of curvature, the center of curvature is outside the first opening in the thickness direction of the metal plate.