US 11,877,446 B2
Three-dimensional memory device with electrically conductive layers containing vertical tubular liners and methods for forming the same
Rahul Sharangpani, Fremont, CA (US); Raghuveer S. Makala, Campbell, CA (US); Fei Zhou, San Jose, CA (US); and Adarsh Rajashekhar, Santa Clara, CA (US)
Assigned to SANDISK TECHNOLOGIES LLC, Addison, TX (US)
Filed by SANDISK TECHNOLOGIES LLC, Addison, TX (US)
Filed on Jun. 11, 2021, as Appl. No. 17/345,860.
Prior Publication US 2022/0399354 A1, Dec. 15, 2022
Int. Cl. H10B 41/35 (2023.01); H10B 41/10 (2023.01); H10B 41/27 (2023.01); H10B 43/10 (2023.01); H10B 43/27 (2023.01); H10B 43/35 (2023.01)
CPC H10B 41/35 (2023.02) [H10B 41/10 (2023.02); H10B 41/27 (2023.02); H10B 43/10 (2023.02); H10B 43/27 (2023.02); H10B 43/35 (2023.02)] 2 Claims
OG exemplary drawing
 
1. A three-dimensional memory device, comprising:
an alternating stack of insulating layers and electrically conductive layers;
memory openings vertically extending through the alternating stack;
memory opening fill structures located within the memory openings, wherein each of the memory opening fill structures comprises a respective vertical stack of memory elements; and
backside blocking dielectric layers which surround the respective electrically conductive layers on at least three sides;
wherein each of the electrically conductive layers comprises a metallic fill material layer and a vertical tubular metallic liner laterally surrounding a respective one of the memory opening fill structures, and located between the metallic fill material layer and a vertically-extending portion of the respective one of the backside blocking dielectric layers, wherein the vertical tubular metallic liner lacks any horizontally-extending portion which extends in a horizontal direction along respective top and bottom surfaces of the insulating layers; and
wherein, for each of the electrically conductive layers, an outer periphery of a top surface of the tubular metallic liner is laterally offset outward from an inner periphery of the top surface of the tubular metallic liner by a lateral distance between an inner sidewall of the tubular metallic liner and an outer sidewall of the tubular metallic liner.