US 11,877,379 B2
Apparatus and method for guiding charged particles
Uwe Niedermayer, Darmstadt (DE)
Assigned to Technische Universität Darmstadt, Darmstadt (DE)
Filed by Technische Universität Darmstadt, Darmstadt (DE)
Filed on Jul. 26, 2021, as Appl. No. 17/385,270.
Claims priority of application No. 102020119875.2 (DE), filed on Jul. 28, 2020.
Prior Publication US 2022/0039247 A1, Feb. 3, 2022
Int. Cl. H05H 9/04 (2006.01); H05H 15/00 (2006.01); H01S 3/09 (2006.01); H05H 7/06 (2006.01); H05H 7/22 (2006.01)
CPC H05H 9/04 (2013.01) [H01S 3/0903 (2013.01); H05H 7/06 (2013.01); H05H 15/00 (2013.01); H05H 2007/222 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An apparatus for guiding charged particles, comprising a substrate having a surface;
a layer on the surface;
an inhomogeneous channel formed by two mutually opposite delimiting structures on a side of the layer that is opposite the substrate;
a radiation device which is designed to generate at least one pulsed laser beam and inject the at least one pulsed laser beam into the channel from a side that is opposite the layer, wherein the layer, for the at least one laser beam, is optically thin and the surface is partially reflective, such that the surface brings about an at least partial reflection of the at least one laser beam for guiding the charged particles, wherein the delimiting structures have a high optical density in comparison with the layer,
and wherein the delimiting structures are designed to guide the particles by means of the at least one laser beam in the channel and thereby alternatingly focus them along the channel and in at least one direction perpendicular to the channel.
 
11. A method for producing an apparatus for guiding charged particles, comprising a substrate having a surface, a layer formed on the surface, an inhomogeneous channel which is formed by two mutually opposite delimiting structures on a side of the layer that is opposite the substrate, and comprising a radiation device which is designed to generate at least one pulsed laser beam and inject the at least one pulsed laser beam into the channel from a side that is opposite the layer wherein the surface is reflective, such that the surface brings about an at least partial reflection of the at least one laser beam for guiding the charged particles, the method comprising the following steps:
providing a structure with a sequence consisting of an upper layer, the layer and the substrate, wherein the layer for the laser beam has a small optical density in comparison with the upper layer; and
etching only the upper layer, thereby forming the delimiting structures of the channel.