US 11,876,502 B2
Surface acoustic wave device
Yasuhiko Hirano, Nagaokakyo (JP); and Daisuke Sekiya, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Kyoto (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Sep. 14, 2022, as Appl. No. 17/944,272.
Application 17/944,272 is a continuation of application No. 16/162,791, filed on Oct. 17, 2018, granted, now 11,476,831.
Application 16/162,791 is a continuation of application No. 15/375,360, filed on Dec. 12, 2016, granted, now 10,135,419, issued on Nov. 20, 2018.
Claims priority of application No. 2015-252619 (JP), filed on Dec. 24, 2015.
Prior Publication US 2023/0006639 A1, Jan. 5, 2023
Int. Cl. H03H 9/05 (2006.01); H03H 9/02 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/0576 (2013.01) [H03H 9/02897 (2013.01); H03H 9/059 (2013.01); H03H 9/1064 (2013.01); H03H 9/1092 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A surface acoustic wave device comprising:
a piezoelectric substrate including a main surface;
at least one interdigital transducer electrode on the main surface;
a cover over the piezoelectric substrate and the at least one interdigital transducer electrode; and
a plurality of hollow spaces between the at least one interdigital transducer electrode and the cover; wherein
the plurality of hollow spaces are defined, at least in part, by a plurality of partition supports interposed between the piezoelectric substrate and the cover;
the plurality of partition supports include a first partition support and a second partition support that, from a plan view, extend in a first direction across the piezoelectric substrate without contacting each other, such that the first partition support includes a first end and a second end along an first axis parallel or substantially parallel to the first direction, and the second partition support includes a first end and a second end along a second axis parallel or substantially parallel to the first direction;
relative to the plurality of partition supports, the first and second partition supports are adjacent to one another in a second direction that is perpendicular or substantially perpendicular to the first direction; and
the first and second partition supports are offset, such that, along the first axis, the first end of the first partition support is closer to an outer periphery of the piezoelectric substrate than the second end of the first partition support is to the outer periphery of the piezoelectric substrate, and, along the second axis, the first end of the second partition support is farther away from the outer periphery of the piezoelectric substrate than the second end of the second partition support is to the outer periphery of the piezoelectric substrate.