CPC H01L 27/14643 (2013.01) [H01L 27/14627 (2013.01); H01L 31/02327 (2013.01); H01L 31/107 (2013.01); H01L 31/02027 (2013.01)] | 20 Claims |
1. A semiconductor device comprising:
a semiconductor substrate that includes a plurality of single-photon avalanche diodes;
a glass layer that covers the semiconductor substrate; and
a groove in the glass layer that overlaps the plurality of single-photon avalanche diodes, wherein the groove receives incident light distributed across a first width and spreads the light to be distributed across a second width at the plurality of single-photon avalanche diodes and wherein the second width is greater than the first width.
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