US 11,876,106 B2
Detection substrate, preparation method thereof and flat panel detector
Xiangmi Zhan, Beijing (CN); Xuecheng Hou, Beijing (CN); Zhi Ding, Beijing (CN); Guan Zhang, Beijing (CN); Jianxing Shang, Beijing (CN); and Jingjie Su, Beijing (CN)
Assigned to Beijing BOE Sensor Technology Co., Ltd., Beijing (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 16/975,830
Filed by Beijing BOE Sensor Technology Co., Ltd., Beijing (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed Oct. 14, 2019, PCT No. PCT/CN2019/111071
§ 371(c)(1), (2) Date Aug. 26, 2020,
PCT Pub. No. WO2021/072604, PCT Pub. Date Apr. 22, 2021.
Prior Publication US 2023/0116284 A1, Apr. 13, 2023
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14612 (2013.01) [H01L 27/14663 (2013.01); H01L 27/14692 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A detection substrate, comprising:
a base substrate;
a plurality of data lines extending along a first direction;
a plurality of gate lines extending along a second direction;
a plurality of thin film transistors arranged on the base substrate;
a plurality of first electrodes, a plurality of photoelectric conversion structures and a plurality of second electrodes arranged in sequence in a laminated manner and electrically connected with each other; and
a plurality of bias lines electrically connected with the plurality of second electrodes;
wherein each first electrode is electrically connected with a corresponding thin film transistor, and an orthographic projection of the each first electrode on the base substrate at least partially overlaps with an orthographic projection of an active layer of the corresponding thin film transistor on the base substrate; and
the each first electrode comprises a first protruding part arranged on a side, close to a corresponding data line, of the each first electrode, and an orthographic projection of the first protruding part on the base substrate is located between the orthographic projection of the active layer on the base substrate and an orthographic projection of the corresponding data line on the base substrate.