CPC H01J 37/32477 (2013.01) [C23C 14/024 (2013.01); C23C 14/0694 (2013.01); C23C 14/083 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 14/5886 (2013.01); H01J 37/32082 (2013.01); H01J 37/32568 (2013.01)] | 20 Claims |
1. A method for preparing a void-free coating on a dielectric window having a central hole for use in a plasma treatment tool, comprising:
applying a first protective coating layer to the dielectric window, the first protective coating layer having an inner perimeter and an outer perimeter, leaving an uncoated annular retreat area between the first protective coating layer inner perimeter and a window inner diameter at the central hole;
polishing the first protective coating layer to produce a flat surface; and
applying a second protective coating layer upon the flat surface of the first protective coating layer to obtain the void-free coating.
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3. A method for preparing a void-free coating on a dielectric window having a central hole for use in a plasma treatment tool, comprising:
applying a first protective coating layer to the dielectric window, leaving an uncoated annular retreat area between the first protective coating layer and the central hole;
polishing the first protective coating layer to produce a flat surface; and
applying a second protective coating layer upon the flat surface of the first protective coating layer to obtain the void-free coating.
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