US 11,875,973 B2
Methods for preparing void-free coatings for plasma treatment components
Shih-Tsung Chen, New Taipei (TW); Tsung-Cheng Ho, Hsinchu (TW); Chien-Yu Wang, Hsinchu (TW); Yen-Shih Wang, Tainan (TW); Jiun-Rong Pai, Jhubei (TW); and Yeh-Chieh Wang, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Hsinchu (TW)
Filed on Feb. 8, 2022, as Appl. No. 17/666,969.
Claims priority of provisional application 63/222,490, filed on Jul. 16, 2021.
Prior Publication US 2023/0025296 A1, Jan. 26, 2023
Int. Cl. C23C 14/58 (2006.01); H01J 37/32 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); C23C 14/06 (2006.01); C23C 14/02 (2006.01)
CPC H01J 37/32477 (2013.01) [C23C 14/024 (2013.01); C23C 14/0694 (2013.01); C23C 14/083 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 14/5886 (2013.01); H01J 37/32082 (2013.01); H01J 37/32568 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for preparing a void-free coating on a dielectric window having a central hole for use in a plasma treatment tool, comprising:
applying a first protective coating layer to the dielectric window, the first protective coating layer having an inner perimeter and an outer perimeter, leaving an uncoated annular retreat area between the first protective coating layer inner perimeter and a window inner diameter at the central hole;
polishing the first protective coating layer to produce a flat surface; and
applying a second protective coating layer upon the flat surface of the first protective coating layer to obtain the void-free coating.
 
3. A method for preparing a void-free coating on a dielectric window having a central hole for use in a plasma treatment tool, comprising:
applying a first protective coating layer to the dielectric window, leaving an uncoated annular retreat area between the first protective coating layer and the central hole;
polishing the first protective coating layer to produce a flat surface; and
applying a second protective coating layer upon the flat surface of the first protective coating layer to obtain the void-free coating.