US 11,875,971 B2
Efficient energy recovery in a nanosecond pulser circuit
James Prager, Seattle, WA (US); Timothy Ziemba, Bainbridge Island, WA (US); Kenneth Miller, Seattle, WA (US); Ilia Slobodov, Seattle, WA (US); and Morgan Quinley, Seattle, WA (US)
Assigned to Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed by Eagle Harbor Technologies, Inc., Seattle, WA (US)
Filed on Feb. 8, 2022, as Appl. No. 17/667,531.
Application 17/667,531 is a continuation of application No. 16/737,615, filed on Jan. 8, 2020, granted, now 11,302,518.
Application 16/737,615 is a continuation in part of application No. 16/697,173, filed on Nov. 26, 2019, granted, now 11,004,660.
Application 16/697,173 is a continuation in part of application No. 16/524,967, filed on Jul. 29, 2019, granted, now 10,811,230.
Application 16/524,967 is a continuation of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140.
Application 16/737,615 is a continuation in part of application No. 16/523,840, filed on Jul. 26, 2019, granted, now 10,892,140.
Claims priority of provisional application 62/789,523, filed on Jan. 8, 2019.
Claims priority of provisional application 62/789,526, filed on Jan. 8, 2019.
Claims priority of provisional application 62/774,078, filed on Nov. 30, 2018.
Claims priority of provisional application 62/717,523, filed on Aug. 10, 2018.
Claims priority of provisional application 62/711,464, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,406, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,334, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,468, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,347, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,457, filed on Jul. 27, 2018.
Claims priority of provisional application 62/711,467, filed on Jul. 27, 2018.
Prior Publication US 2022/0165542 A1, May 26, 2022
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01)
CPC H01J 37/32146 (2013.01) [H01J 37/32091 (2013.01); H01J 37/32128 (2013.01); H01J 37/32174 (2013.01); H01J 37/32715 (2013.01); H01L 21/6833 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A nanosecond pulser circuit comprising:
a high voltage power supply, wherein the high voltage power supply provides DC power with a voltage greater than 1 kV;
a plurality of switches electrically coupled with the high voltage power supply, the plurality of switches switch voltage from the high voltage power supply at high frequencies;
a transformer having a primary side and a secondary side, the plurality of switches electrically coupled with the primary side of the transformer; and
an energy recovery circuit electrically coupled with the secondary side of the transformer, the energy recovery circuit comprising:
an energy recovery inductor electrically coupled with the high voltage power supply; and
a diode disposed in series with the energy recovery inductor and arranged to restrict current flowing from the high voltage power supply through the energy recovery inductor to a load located on the secondary side of the transformer.