US 11,875,970 B2
Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus
Longbao Chen, Shanghai (CN); Jie Liang, Shanghai (CN); Weina Wang, Shanghai (CN); and Leyi Tu, Shanghai (CN)
Assigned to ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA, Shanghai (CN)
Filed by Advanced Micro-Fabrication Equipment Inc. China, Shanghai (CN)
Filed on Dec. 17, 2019, as Appl. No. 16/718,056.
Claims priority of application No. 201811543565.9 (CN), filed on Dec. 17, 2018; and application No. 201910600861.6 (CN), filed on Jul. 4, 2019.
Prior Publication US 2020/0194231 A1, Jun. 18, 2020
Int. Cl. H01J 37/32 (2006.01); H01L 21/683 (2006.01); H05H 1/46 (2006.01)
CPC H01J 37/32091 (2013.01) [H01J 37/32165 (2013.01); H01L 21/6831 (2013.01); H05H 1/46 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A radio frequency electrode assembly for a plasma processing apparatus, comprising:
a base in which a first fluid passage is provided, the first fluid passage being configured for connecting to a first fluid source;
an electrostatic chuck disposed on the base, the electrostatic chuck having a first supporting face for supporting a substrate;
a focus ring disposed peripheral to the electrostatic chuck; and
a heat conducting ring disposed around the base, the heat conducting ring being disposed below the focus ring, the heat conducting ring enclosing at least part of the base, a second fluid passage being provided in the heat conducting ring, the second fluid passage having a fluid inlet and a fluid outlet connected to a second fluid source, the second fluid entering the second fluid passage via the fluid inlet and flowing out of the second fluid passage from the fluid outlet, and the fluid inlet and fluid outlet being in same horizontal plane, heat conduction being enabled between the heat conducting ring and the focus ring;
wherein the distances from top of the second fluid passage to bottom of focus ring vary along perimeter of the second fluid passage, such that the top of the second fluid passage rises from the fluid inlet towards the fluid outlet.