US 11,874,540 B2
Capacitor resonator modulator
Weiwei Zhang, Southampton (GB); Graham Reed, Godalming (GB); David Thomson, Southampton (GB); Martin Ebert, Southampton (GB); and Shinichi Saito, Southampton (GB)
Assigned to University of Southampton, Hampshire (GB)
Filed by UNIVERSITY OF SOUTHAMPTON, Hampshire (GB)
Filed on Jan. 28, 2022, as Appl. No. 17/587,679.
Claims priority of application No. 2101277 (GB), filed on Jan. 29, 2021.
Prior Publication US 2022/0244580 A1, Aug. 4, 2022
Int. Cl. G02F 1/025 (2006.01)
CPC G02F 1/025 (2013.01) [G02F 2202/06 (2013.01)] 29 Claims
OG exemplary drawing
 
1. A resonator modulator for modulating light in a photonic circuit, the resonator modulator comprising:
a capacitor formed of a ring-shaped insulating region sandwiched between an outer conductive region and an inner conductive region, wherein at least one of the outer conductive regions or the inner conductive regions is a polycrystalline semiconductor material; and
wherein the outer conductive region extends laterally outwards from the ring-shaped insulating region.