CPC G01T 7/00 (2013.01) [C01B 32/158 (2017.08); G01T 1/29 (2013.01); H01J 2237/24405 (2013.01)] | 20 Claims |
1. A device for measuring electron beam comprising:
a Faraday cup comprising an opening;
a porous carbon material layer located on a surface of the Faraday cup and suspended via the opening, wherein a portion of the porous carbon material layer suspended in the air at the opening is defined as a suspended portion, a length of the suspended portion is greater than or equal to a maximum diameter of an electron beam to be measured; a diameter or a width of the porous carbon material layer is smaller than a minimum diameter of a cross section of the electron beam to be measured; and the porous carbon material layer comprises a plurality of carbon material particles, and a plurality of micro gaps are defined by the plurality of carbon material particles; and
an electricity meter electrically connected to the porous carbon material layer.
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