US 11,874,414 B2
Device and method for measuring electron beam
Ke Zhang, Beijing (CN); Guo Chen, Beijing (CN); Peng Liu, Beijing (CN); Kai-Li Jiang, Beijing (CN); and Shou-Shan Fan, Beijing (CN)
Assigned to Tsinghua University, Beijing (CN); and HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed by Tsinghua University, Beijing (CN); and HON HAI PRECISION INDUSTRY CO., LTD., New Taipei (TW)
Filed on Apr. 8, 2021, as Appl. No. 17/225,726.
Claims priority of application No. 202011497804.9 (CN), filed on Dec. 17, 2020.
Prior Publication US 2022/0196482 A1, Jun. 23, 2022
Int. Cl. G01T 7/00 (2006.01); C01B 32/158 (2017.01); G01T 1/29 (2006.01)
CPC G01T 7/00 (2013.01) [C01B 32/158 (2017.08); G01T 1/29 (2013.01); H01J 2237/24405 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device for measuring electron beam comprising:
a Faraday cup comprising an opening;
a porous carbon material layer located on a surface of the Faraday cup and suspended via the opening, wherein a portion of the porous carbon material layer suspended in the air at the opening is defined as a suspended portion, a length of the suspended portion is greater than or equal to a maximum diameter of an electron beam to be measured; a diameter or a width of the porous carbon material layer is smaller than a minimum diameter of a cross section of the electron beam to be measured; and the porous carbon material layer comprises a plurality of carbon material particles, and a plurality of micro gaps are defined by the plurality of carbon material particles; and
an electricity meter electrically connected to the porous carbon material layer.