US 11,874,301 B2
Probe systems including imaging devices with objective lens isolators, and related methods
Kazuki Negishi, Hillsboro, OR (US); Yu-Wen Huang, Tigard, OR (US); Gerald Lee Gisler, St. Paul, OR (US); Eric Robert Christenson, Tualatin, OR (US); and Michael E. Simmons, Colton, OR (US)
Assigned to FormFactor, Inc., Livermore, CA (US)
Filed by FormFactor, Inc., Livermore, CA (US)
Filed on Oct. 23, 2020, as Appl. No. 17/078,778.
Claims priority of provisional application 62/931,581, filed on Nov. 6, 2019.
Prior Publication US 2021/0132115 A1, May 6, 2021
Int. Cl. G01R 1/07 (2006.01); G01R 31/308 (2006.01); G01R 31/319 (2006.01)
CPC G01R 1/07 (2013.01) [G01R 31/308 (2013.01); G01R 31/31905 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A probe system, comprising:
an enclosure that at least partially defines an enclosure volume configured to at least substantially enclose a substrate that includes one or more devices under test (DUTs);
a testing assembly configured to test the one or more DUTs;
an imaging device configured to generate an optical image of at least a portion of the probe system, wherein the imaging device includes:
(i) an imaging device objective lens that extends at least partially within the enclosure;
(ii) an imaging device body that operatively supports the imaging device objective lens and that is positioned at least partially exterior of the enclosure volume; and
(iii) an objective lens isolator that at least partially electrically isolates the imaging device objective lens from the imaging device body; and
an electrical grounding assembly configured to restrict electromagnetic noise from entering the enclosure volume; wherein the electrical grounding assembly includes an objective lens grounding conductor that electrically connects the imaging device objective lens to an electrical ground; and wherein the objective lens grounding conductor extends at least substantially circumferentially around the imaging device objective lens.