US 11,874,244 B2
Apparatus for maintaining liquid membrane and sensor apparatus
Yoshiaki Sugizaki, Fujisawa (JP); and Tatsuro Saito, Kawasaki (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Minato-ku (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Minato-ku (JP)
Filed on Mar. 13, 2020, as Appl. No. 16/818,075.
Claims priority of application No. 2019-168663 (JP), filed on Sep. 17, 2019.
Prior Publication US 2021/0080416 A1, Mar. 18, 2021
Int. Cl. G01N 27/12 (2006.01); G01N 33/497 (2006.01); B01L 3/00 (2006.01); G01N 33/543 (2006.01); G01N 27/414 (2006.01); H01L 29/16 (2006.01)
CPC G01N 27/12 (2013.01) [B01L 3/508 (2013.01); G01N 27/4141 (2013.01); G01N 33/497 (2013.01); G01N 33/54373 (2013.01); B01L 2300/06 (2013.01); B01L 2300/12 (2013.01); H01L 29/1606 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A sensor apparatus comprising:
a sensor element;
a cover member disposed above the sensor element, which defines a first flow passage, a second flow passage and a third flow passage,
wherein the first flow passage takes in a gas sample, the second flow passage introduces the gas sample onto the sensor element, the third flow passage sends the gas sample to an outside of the sensor apparatus, and the first flow passage, the second flow passage and the third flow passage communicate with one another;
an apparatus for maintaining a liquid membrane on the sensor element, comprising:
a liquid supply unit configured to supply a liquid onto the sensor element and to form a liquid membrane, and
a liquid discharge unit configured to discharge the liquid in the liquid membrane,
wherein the liquid supply unit includes a first container which accommodates the liquid, and the liquid discharge unit includes a space in which the liquid discharged from the liquid membrane is collected and a first member having one end arranged in the space and another end arranged on the sensor element,
wherein the liquid discharge unit is configured to discharge the liquid in the liquid membrane by the first member and the first member is made from a non-woven fabric; and
an airflow generation apparatus which generates a flow of air flowing from the first flow passage, passing through the second flow passage, and flowing to the third flow passage;
wherein
the sensor element is arranged between the liquid supply unit and the liquid discharge unit, and
part of the first member of the liquid discharge unit is arranged in the third flow passage.