US 11,874,237 B2
System and method for measuring a sample by x-ray reflectance scatterometry
Heath Pois, Fremont, CA (US); David Reed, Belmont, CA (US); Bruno Shueler, San Jose, CA (US); Rodney Smedt, Los Gatos, CA (US); and Jeffrey Fanton, Los Altos, CA (US)
Assigned to NOVA MEASURING INSTRUMENTS INC., Fremont, CA (US)
Filed by NOVA MEASURING INSTRUMENTS INC., Freemont, CA (US)
Filed on Dec. 8, 2020, as Appl. No. 17/114,842.
Application 17/114,842 is a continuation of application No. 16/686,953, filed on Nov. 18, 2019, granted, now 10,859,519.
Application 16/686,953 is a continuation of application No. 16/181,287, filed on Nov. 5, 2018, granted, now 10,481,112.
Application 16/181,287 is a continuation of application No. 15/451,104, filed on Mar. 6, 2017, granted, now 10,119,925.
Application 15/451,104 is a continuation of application No. 14/161,942, filed on Jan. 23, 2014, granted, now 9,588,066.
Prior Publication US 2021/0164924 A1, Jun. 3, 2021
Int. Cl. G01N 23/201 (2018.01); G01N 23/207 (2018.01); H01L 21/66 (2006.01)
CPC G01N 23/201 (2013.01) [G01N 23/207 (2013.01); G01N 2223/054 (2013.01); H01L 22/12 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of measuring a sample by X-ray reflectance scatterometry, the method comprising:
directing an X-ray generated within a first sub-chamber through a X-ray transmissive region that is formed between the first-sub chamber and a second sub-chamber towards a sample having a periodic structure and located within a second sub-chamber to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles;
suppressing, by a magnetic electron suppression device that is positioned within the first sub-chamber, electrons emitted, in addition to the X-ray, from the X-ray source as a result of illumination of the X-ray source with an electron beam from an electron gun;
and
collecting at least a portion of the scattered X-ray beam.