US 11,874,172 B2
Fourier transform infrared spectrophotometer
Hideaki Katsu, Kyoto (JP); and Hiromasa Maruno, Kyoto (JP)
Assigned to Shimadzu Corporation, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Feb. 18, 2022, as Appl. No. 17/675,125.
Claims priority of application No. 2021-029945 (JP), filed on Feb. 26, 2021.
Prior Publication US 2022/0276096 A1, Sep. 1, 2022
Int. Cl. G01J 3/453 (2006.01); G01N 21/35 (2014.01); G01J 3/02 (2006.01)
CPC G01J 3/4535 (2013.01) [G01J 3/021 (2013.01); G01J 3/0202 (2013.01); G01N 21/35 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A Fourier transform infrared spectrophotometer comprising:
a main interferometer including an infrared light source that emits an infrared light beam, a beam splitter, a fixed mirror, and a moving mirror;
a control interferometer including a control light source that emits a control light beam, the beam splitter, the fixed mirror, and the moving mirror;
an infrared detector that detects an infrared interference light beam that is generated by the main interferometer and passes through a sample or is reflected by the sample;
a control light detector that detects a control interference light beam generated by the control interferometer;
a waveplate disposed on an optical path of the control light beam and between the fixed mirror or the moving mirror and the beam splitter; and
a support member that supports the waveplate,
wherein an outer perimeter of the waveplate includes
a supported region supported by the support member, and
a released region spaced apart from the support member.