US 11,873,916 B2
Fluid control device, fluid supply system, and fluid supply method
Masahiko Takimoto, Osaka (JP); Toshihide Yoshida, Osaka (JP); Tsutomu Shinohara, Osaka (JP); and Kouji Nishino, Osaka (JP)
Assigned to FUJIKIN INCORPORATED, Osaka (JP)
Appl. No. 18/003,259
Filed by FUJIKIN INCORPORATED, Osaka (JP)
PCT Filed Jun. 15, 2021, PCT No. PCT/JP2021/022624
§ 371(c)(1), (2) Date Dec. 23, 2022,
PCT Pub. No. WO2022/004349, PCT Pub. Date Jan. 6, 2022.
Claims priority of application No. 2020-111466 (JP), filed on Jun. 29, 2020.
Prior Publication US 2023/0244251 A1, Aug. 3, 2023
Int. Cl. F16K 31/02 (2006.01); G05D 7/06 (2006.01); H01L 21/67 (2006.01); F16K 37/00 (2006.01)
CPC F16K 31/02 (2013.01) [G05D 7/0623 (2013.01); G05D 7/0635 (2013.01); F16K 37/00 (2013.01); F16K 37/005 (2013.01); G05D 7/0652 (2013.01); H01L 21/67017 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A fluid control device comprising:
a valve device configured to open/close a flow path and adjust a flow rate of a fluid flowing through the flow path,
a pressure sensor provided upstream of the valve device; and
a control circuit connected to the valve device and the pressure sensor;
wherein the valve device includes a main actuator operated by a driving fluid, a sub actuator extendable by an electrical drive, a valve element operable by the main actuator and the sub actuator, an operating member moved by the main actuator and the sub actuator, and an elastic member for biasing the sub actuator toward the valve element,
the main actuator is configured to move the operation member against a biasing force of the elastic member and the biasing force of the elastic member is increased by an extension of the sub actuator to move the operation member, and
the control circuit controls an operation of the sub actuator based on a pressure measured by the pressure sensor and a reference pressure drop curve, in a state where an upstream side of the fluid control device is closed and the valve device is opened by using the main actuator.