CPC F16F 7/1005 (2013.01) [F16F 7/104 (2013.01); F16F 15/002 (2013.01); F16F 15/022 (2013.01); G05B 19/042 (2013.01); F16F 2222/08 (2013.01); F16F 2224/0208 (2013.01); F16F 2228/066 (2013.01); F16F 2230/18 (2013.01); G05B 2219/21137 (2013.01); G05B 2219/25252 (2013.01); G05B 2219/25257 (2013.01)] | 24 Claims |
1. A vibration-isolation system comprising:
an intermediate mass;
a feedback motion sensor arranged to sense motion of the intermediate mass;
a feedforward motion sensor to sense motion of a base;
an actuator configured to drive the intermediate mass relative to the base, wherein the base is configured to support at least the actuator and the intermediate mass; and
a control system configured to process a first signal from the feedback motion sensor and a second signal from the feedforward motion sensor and output a drive signal to drive the actuator to reduce vibrational motion of the intermediate mass, wherein without application of the second signal from the feedforward motion sensor to the control system, vibrational levels of the intermediate mass during operation of the vibration-isolation system saturate the feedback motion sensor.
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