US 11,873,556 B2
Raw material supply apparatus and film forming apparatus
Tomohisa Kimoto, Nirasaki (JP); Noriyuki Watanabe, Nirasaki (JP); Kensaku Narushima, Nirasaki (JP); Kouichi Sekido, Nirasaki (JP); and Takuya Kawaguchi, Nirasaki (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Apr. 13, 2021, as Appl. No. 17/229,799.
Claims priority of application No. 2020-074360 (JP), filed on Apr. 17, 2020.
Prior Publication US 2021/0324513 A1, Oct. 21, 2021
Int. Cl. G05D 7/06 (2006.01); G05D 23/12 (2006.01); H01L 21/67 (2006.01); F16K 21/00 (2006.01); C23C 16/448 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01); C23C 16/455 (2006.01); G05D 23/20 (2006.01); F16K 24/04 (2006.01)
CPC C23C 16/448 (2013.01) [C23C 16/4412 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); C23C 16/52 (2013.01); F16K 24/04 (2013.01); G05D 7/0629 (2013.01); G05D 23/12 (2013.01); G05D 23/2037 (2013.01); H01L 21/67017 (2013.01); F16K 21/00 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A raw material supply apparatus comprising:
a raw material tank containing a raw material gas;
a raw material supply path through which the raw material gas is supplied from the raw material tank into a processing container;
a storage tank provided in the raw material supply path and configured to store the raw material gas;
a valve provided in the raw material supply path;
a pressure sensor configured to detect an internal pressure of the storage tank;
a raw material exhaust path connected to the raw material supply path downstream of the storage tank and through which the raw material gas in the raw material supply path is exhausted;
an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path and the storage tank based on an adjustment of an opening degree of the opening degree adjustment mechanism; and
a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a first value detected by the pressure sensor.