US 11,873,214 B2
Nano-electro-mechanical tags for identification and authentication
Roozbeh Tabrizian, Gainesville, FL (US); and Swarup Bhunia, Gainesville, FL (US)
Assigned to University of Florida Research Foundation, Incorporated, Gainesville, FL (US)
Filed by University of Florida Research Foundation, Incorporated, Gainesville, FL (US)
Filed on Jan. 19, 2021, as Appl. No. 17/152,294.
Claims priority of provisional application 62/964,014, filed on Jan. 21, 2020.
Prior Publication US 2021/0221675 A1, Jul. 22, 2021
Int. Cl. B81C 1/00 (2006.01); H10N 30/05 (2023.01); H10N 30/06 (2023.01); H10N 30/50 (2023.01); H10N 30/85 (2023.01); H10N 30/87 (2023.01); H10N 30/093 (2023.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01)
CPC B81C 1/0019 (2013.01) [H10N 30/05 (2023.02); H10N 30/06 (2023.02); H10N 30/093 (2023.02); H10N 30/50 (2023.02); H10N 30/85 (2023.02); H10N 30/87 (2023.02); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for fabricating a nano electromechanical system (NEMS), the method comprising:
forming a protective layer above a substrate;
forming a first conductive layer above the protective layer, wherein the first conductive layer forms a first electrode;
forming a piezoelectric layer above the first conductive layer;
forming a second conductive layer above the piezoelectric layer;
patterning the second conductive layer to form a second electrode; and
forming one or more trenches that extends through the first conductive layer, the piezoelectric layer and the second conductive layer, wherein the protective layer, the first and second conductive layers and the piezoelectric layer are optically transparent.