US 11,872,669 B2
Cover to vacuum debris while grinding
Toshiyuki Moriya, Tokyo (JP); and Tomohiro Shirahama, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Oct. 28, 2021, as Appl. No. 17/452,616.
Claims priority of application No. 2020-187880 (JP), filed on Nov. 11, 2020.
Prior Publication US 2022/0143772 A1, May 12, 2022
Int. Cl. B24B 7/04 (2006.01); H01L 21/304 (2006.01); B24B 55/04 (2006.01); B24B 37/34 (2012.01); B24B 55/12 (2006.01)
CPC B24B 7/04 (2013.01) [B24B 37/345 (2013.01); B24B 55/04 (2013.01); B24B 55/12 (2013.01); H01L 21/304 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A processing machine comprising:
a chuck table having a holding surface that holds a workpiece thereon;
a chuck table cover enclosing surroundings of the chuck table and having an opening through which the holding surface of the chuck table is able to protrude;
a processing unit including a spindle, a spindle housing that rotatably holds the spindle therein, and a disc-shaped mount portion arranged on a lower end portion of the spindle, the lower end portion projecting from the spindle housing, the processing unit being configured to process the workpiece by a processing tool mounted on a lower part of the mount portion;
a processing feed mechanism that feeds the processing unit in an up-down direction to perform processing;
a processing chamber construction cover that covers the chuck table and the mount portion; and
a processing tool cover that is secured to a lower end portion of the spindle housing, the lower end portion being located inside the processing chamber construction cover, has an upper wall defining an insertion opening through which the spindle is able to be inserted at the lower end portion thereof, and a side wall that is connected to the upper wall and extends downwardly from the upper wall, is disposed inside the processing chamber construction cover, and covers the processing tool from above and sides by the upper wall and the side wall.