CPC H01L 33/08 (2013.01) [H01L 33/0093 (2020.05); H01L 33/0095 (2013.01); H01L 33/22 (2013.01); H01L 33/382 (2013.01); H01L 33/62 (2013.01); H01L 2933/0066 (2013.01)] | 19 Claims |
1. A light-emitting element, comprising:
a base, comprising an upper surface, a lower surface and a plurality of side walls;
a plurality of first modified regions formed on any one of the plurality of side walls, and wherein one of the plurality of first modified regions is extended between the lower surface and the upper surface;
a semiconductor stack formed on the upper surface;
an isolation region on the upper surface, not covered by the semiconductor stack and surrounding the semiconductor stack; and
a dielectric stack covering the semiconductor stack and the isolation region,
wherein the plurality of first modified regions is formed by a laser irradiating the base along the isolation region, and
wherein the dielectric stack has a reflectance of 10%-50% and/or a transmittance of 50%-90% for the laser with a wavelength between 1000 nm to 1100 nm.
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