CPC H01L 21/6833 (2013.01) [C23C 16/4586 (2013.01); H01J 37/32697 (2013.01); H01J 37/32724 (2013.01); H01J 2237/3321 (2013.01)] | 17 Claims |
1. A substrate support assembly, comprising:
a chuck body defining a substrate support surface, wherein:
the substrate support surface defines a plurality of protrusions that extend upward from the substrate support surface;
the substrate support surface defines first annular groove and a second annular groove;
the first annular groove and the second annular groove are radially spaced apart from one another;
a first subset of the plurality of protrusions are disposed within the first annular groove; and
a second subset of the plurality of protrusions are disposed within the second annular groove; and
a support stem coupled with the chuck body.
|