CPC H01L 21/6833 (2013.01) [H01L 21/67103 (2013.01)] | 9 Claims |
1. An electrostatic chuck that is configured to adsorb and retain an object thereon, the electrostatic chuck comprising:
a base body on which the object is mounted, the base body being an integral unitary body;
an electrostatic electrode that is provided in the base body;
a plurality of heating elements that are provided in the base body;
a plurality of current control elements that are provided in the base body, and each of which is connected in series with a corresponding one of the heating elements; and
a control circuit that is a semiconductor integrated circuit entirely built in the base body, and that is connected to the current control elements and configured to control operations of the current control elements.
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