US 11,869,787 B2
Substrate container valve assemblies
Matthew A Fuller, Colorado Springs, CO (US); Mark V. Smith, Colorado Springs, CO (US); Jeffery J. King, Colorado Springs, CO (US); and John Burns, Colorado Springs, CO (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on May 28, 2020, as Appl. No. 16/886,371.
Application 16/886,371 is a division of application No. 15/532,320, abandoned, previously published as PCT/US2015/063260, filed on Dec. 1, 2015.
Claims priority of provisional application 62/086,022, filed on Dec. 1, 2014.
Prior Publication US 2020/0365435 A1, Nov. 19, 2020
Int. Cl. B65D 85/30 (2006.01); H01L 21/673 (2006.01); F16K 15/14 (2006.01); F16K 27/02 (2006.01)
CPC H01L 21/67393 (2013.01) [F16K 15/148 (2013.01); F16K 27/0209 (2013.01); H01L 21/6732 (2013.01); H01L 21/67379 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A substrate container, comprising:
a container portion having a container wall defining a container interior, the container portion further having a plurality of substantially horizontal spaced apart substrate shelves disposed within the interior;
at least one substantially tubular environmental control component for directing fluid flow into the container interior;
a check-valve assembly disposed within the control component, adapted to allow fluid flow into the substrate container through the control component, the check-valve assembly comprising:
a substantially cylindrical valve seat portion; and
an elastomeric umbrella check valve member held within the valve seat portion to substantially disallow fluid flow out of the container through the control component; and
an elastomeric interface stacked with the check-valve assembly, an end of the elastomeric interface being sealingly engaged with an end of the check-valve assembly, and an outer circumference of the elastomeric interface being sealingly connected to the control component.