CPC H01L 21/67393 (2013.01) [F16K 15/148 (2013.01); F16K 27/0209 (2013.01); H01L 21/6732 (2013.01); H01L 21/67379 (2013.01)] | 5 Claims |
1. A substrate container, comprising:
a container portion having a container wall defining a container interior, the container portion further having a plurality of substantially horizontal spaced apart substrate shelves disposed within the interior;
at least one substantially tubular environmental control component for directing fluid flow into the container interior;
a check-valve assembly disposed within the control component, adapted to allow fluid flow into the substrate container through the control component, the check-valve assembly comprising:
a substantially cylindrical valve seat portion; and
an elastomeric umbrella check valve member held within the valve seat portion to substantially disallow fluid flow out of the container through the control component; and
an elastomeric interface stacked with the check-valve assembly, an end of the elastomeric interface being sealingly engaged with an end of the check-valve assembly, and an outer circumference of the elastomeric interface being sealingly connected to the control component.
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