US 11,867,737 B2
Detection apparatus and detection method
Kazuhiro Inoue, Inagi Tokyo (JP); Tetsu Shijo, Setagaya Tokyo (JP); and Yasuhiro Kanekiyo, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 28, 2022, as Appl. No. 17/682,665.
Claims priority of application No. 2021-144877 (JP), filed on Sep. 6, 2021.
Prior Publication US 2023/0076743 A1, Mar. 9, 2023
Int. Cl. G01R 29/08 (2006.01); G01R 31/34 (2020.01)
CPC G01R 29/0878 (2013.01) [G01R 29/0814 (2013.01); G01R 29/0892 (2013.01); G01R 31/343 (2013.01); G01R 31/346 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A detection apparatus comprising:
a plurality of pairs of conductors configured to detect an electromagnetic wave occurring due to a discharge phenomenon in a target apparatus,
wherein the plurality of the pairs of conductors are arranged in a near field region of the target apparatus in which the electromagnetic wave occurs, and
wherein the plurality of the pairs of conductors are arranged at different distances from the target apparatus.
 
20. A detection method comprising:
detecting, by a plurality of the pairs of conductors, an electromagnetic wave occurring due to a discharge phenomenon in a target apparatus,
wherein each of the plurality of the pairs of conductors are arranged in a near field region of the target apparatus in which the electromagnetic wave occurs, and
wherein the plurality of the pairs of conductors are arranged at different distances from the target apparatus.
 
21. A detection apparatus comprising:
a pair of conductors configured to detect an electromagnetic wave occurring due to a discharge phenomenon in a target apparatus,
wherein the pair of conductors are arranged in a near field region of the target apparatus in which the electromagnetic wave occurs, and
wherein the pair of conductors have three-dimensional shapes.
 
22. A detection apparatus comprising:
a pair of conductors configured to detect an electromagnetic wave occurring due to a discharge phenomenon in a target apparatus,
wherein the pair of conductors are arranged in a near field region of the target apparatus in which the electromagnetic wave occurs, and
wherein the pair of conductors have shapes different from each other.
 
23. A detection apparatus comprising:
a plurality of pairs of conductors configured to detect an electromagnetic wave occurring due to a discharge phenomenon in a target apparatus,
wherein the plurality of the pairs of conductors are arranged in a near field region of the target apparatus in which the electromagnetic wave occurs,
wherein the plurality of the pairs of conductors are arranged in different orientations with respect to the target apparatus.