CPC G01N 29/245 (2013.01) [B06B 1/0644 (2013.01); G01N 29/14 (2013.01); G01H 11/08 (2013.01)] | 19 Claims |
1. An ultrasonic probe, comprising:
a first member including a first metal; and
a first vibrating element,
the first vibrating element including:
a first electrode,
a piezoelectric layer provided between the first electrode and the first member, and
a second electrode provided between the piezoelectric layer and the first member and being in contact with the first member;
wherein one of elements included in the second electrode and a first metal element included in the first metal are bonded by silicon by molecular bonding, wherein the first member functions a backing material for attenuating ultrasonic waves.
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