US 11,867,665 B2
Ultrasonic probe and ultrasonic inspection device
Tsuyoshi Kobayashi, Kawasaki Kanagawa (JP); Tomio Ono, Yokohama Kanagawa (JP); Norihiko Tanaka, Yokohama Kanagawa (JP); and Tomonori Abe, Yokohama Kanagawa (JP)
Assigned to KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 22, 2022, as Appl. No. 17/677,254.
Claims priority of application No. 2021-145606 (JP), filed on Sep. 7, 2021.
Prior Publication US 2023/0076916 A1, Mar. 9, 2023
Int. Cl. G01N 29/24 (2006.01); G01N 29/14 (2006.01); B06B 1/06 (2006.01); G01H 11/08 (2006.01)
CPC G01N 29/245 (2013.01) [B06B 1/0644 (2013.01); G01N 29/14 (2013.01); G01H 11/08 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An ultrasonic probe, comprising:
a first member including a first metal; and
a first vibrating element,
the first vibrating element including:
a first electrode,
a piezoelectric layer provided between the first electrode and the first member, and
a second electrode provided between the piezoelectric layer and the first member and being in contact with the first member;
wherein one of elements included in the second electrode and a first metal element included in the first metal are bonded by silicon by molecular bonding, wherein the first member functions a backing material for attenuating ultrasonic waves.