US 11,867,643 B2
Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried
Hyo Chang Lee, Sejong-si (KR); Jung Hyung Kim, Daejeon (KR); Dae Jin Seong, Gongju-si (KR); and Hee Jung Yeom, Daejeon (KR)
Assigned to KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE, Daejeon (KR)
Appl. No. 17/050,373
Filed by KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE, Daejeon (KR)
PCT Filed Apr. 15, 2019, PCT No. PCT/KR2019/004500
§ 371(c)(1), (2) Date Oct. 23, 2020,
PCT Pub. No. WO2020/159003, PCT Pub. Date Aug. 6, 2020.
Claims priority of application No. 10-2019-0012572 (KR), filed on Jan. 31, 2019; application No. 10-2019-0032099 (KR), filed on Mar. 21, 2019; and application No. 10-2019-0032117 (KR), filed on Mar. 21, 2019.
Prior Publication US 2021/0116393 A1, Apr. 22, 2021
Int. Cl. G01N 22/00 (2006.01); H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01Q 1/24 (2006.01); H01Q 1/52 (2006.01); H01Q 9/02 (2006.01); H01Q 21/00 (2006.01); H01Q 21/06 (2006.01)
CPC G01N 22/00 (2013.01) [H01J 37/3222 (2013.01); H01J 37/32715 (2013.01); H01J 37/32935 (2013.01); H01L 21/6833 (2013.01); H01Q 1/24 (2013.01); H01Q 1/523 (2013.01); H01Q 1/525 (2013.01); H01Q 9/02 (2013.01); H01Q 21/0031 (2013.01); H01Q 21/065 (2013.01); H01J 2237/2007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A planar-type plasma diagnosis apparatus comprising:
a transmission antenna configured to apply a frequency-variable microwave to plasma;
a reception antenna configured to receive the microwave from the plasma; and
a body part configured to encompass the transmission antenna and the reception antenna so that the transmission antenna and the reception antenna are insulated from each other,
wherein,
each of an upper surface of the transmission antenna configured to apply the microwave and an upper surface of the reception antenna configured to receive the microwave has a planar shape,
the upper surface of the transmission antenna and the upper surface of the reception antenna are horizontally adjacent to each other to face each other, and
in each of the upper surface of the transmission antenna and the upper surface of the reception antenna, a length from one end to the other end in an opposite direction is smaller than a length from one end to the other end in a direction perpendicular to the opposite direction.