CPC F16J 9/26 (2013.01) [C23C 14/0605 (2013.01); C23C 14/325 (2013.01)] | 8 Claims |
1. A sliding member comprising a DLC coating on the outer peripheral sliding surface thereof,
wherein the DLC coating has an S band having a peak in the vicinity of 1150 cm−1, a D band having a peak in the vicinity of 1400 cm−1, and a G band having a peak in the vicinity of 1580 cm−1, in a Raman spectrum; and
wherein a ratio (IG/IS) of a peak intensity of the G band to a peak intensity of the S band is 5.6 or less, and a ratio (AG/AS) of a peak intensity area of the G band to a peak intensity area of the S band is 4.7 or less, a ratio (IG/IS+D) of the peak intensity of the G band to a sum of the peak intensity of the S band and a peak intensity of the D band is 1.1 or less, and a ratio (AG/AS+D) of the peak intensity area of the G band to a sum of the peak intensity area of the S band and a peak intensity area of the D band is 0.76 or less.
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